Nanoindentation characterization of thin film stack structures by finite element analysis and experiments using acoustic emission testing

Subjects

Subjects :

Mechanics of Materials
Mechanical Engineering
General Materials Science
Condensed Matter Physics

Details

ISSN :

13698001

Volume :

147

Database :

OpenAIRE

Journal :

Materials Science in Semiconductor Processing

Accession number :

edsair.doi...........956712f2d0e964a966b330eaa51ab0ea

Full Text :

https://doi.org/10.1016/j.mssp.2022.106737