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A new SiC/HfB2 based low power gas sensor
- Source :
- Sensors and Actuators B: Chemical. 77:111-115
- Publication Year :
- 2001
- Publisher :
- Elsevier BV, 2001.
-
Abstract
- A new SiC-based heated micro gas sensor with a 100 μm ×100 μm heated membrane and excellent heater long-term stability is presented. Combining a previously presented micro hotplate with new gas sensitive (2 1 1) oriented In 2 O 3 thin film layers yields a very stable low power NO 2 gas sensor. The modular design allows its operation at operating voltages of either 1–2 or 12–24 V for battery and grid powered automotive applications. A total of 20 mW of power is sufficient for the operation at 250°C. The sensitivity and signal reproducibility in the MAK-range (5 ppm, maximum workplace concentration according to German federal law) is good. The response time τ 50 =50 s needs improvement.
- Subjects :
- Battery (electricity)
Materials science
business.industry
Metals and Alloys
Response time
Modular design
Condensed Matter Physics
Signal
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Power (physics)
Materials Chemistry
Optoelectronics
Electrical and Electronic Engineering
Thin film
business
Instrumentation
Sensitivity (electronics)
Voltage
Subjects
Details
- ISSN :
- 09254005
- Volume :
- 77
- Database :
- OpenAIRE
- Journal :
- Sensors and Actuators B: Chemical
- Accession number :
- edsair.doi...........95490521567f2de9c41a8b2f7de99301