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Advanced MEMS Inspection by Direct and Indirect Solution Strategies

Authors :
Ryszard J. Pryputniewicz
Source :
Optical Imaging and Metrology: Advanced Technologies
Publication Year :
2012
Publisher :
Wiley, 2012.

Subjects

Subjects :
Microelectromechanical systems
Engineering
Full field of view
business.industry
law
Gyroscope
Control engineering
business
Accelerometer
law.invention

Details

Database :
OpenAIRE
Journal :
Optical Imaging and Metrology
Accession number :
edsair.doi...........9545debf0d13698962ded12658108ec4

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Authors Abstract Subjects Details