Single-shot selective femtosecond and picosecond infrared laser crystallization of an amorphous Ge/Si multilayer stack

Subjects

Subjects :

Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

Details

ISSN :

00303992

Volume :

161

Database :

OpenAIRE

Journal :

Optics & Laser Technology

Accession number :

edsair.doi...........951ca562268409b89dfb5eceee8f9d7e

Full Text :

https://doi.org/10.1016/j.optlastec.2023.109161