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Research on the properties of Ta2O5 optical films prepared with APS plasma assisted deposition
- Source :
- Seventh Asia Pacific Conference on Optics Manufacture (APCOM 2021).
- Publication Year :
- 2022
- Publisher :
- SPIE, 2022.
Details
- Database :
- OpenAIRE
- Journal :
- Seventh Asia Pacific Conference on Optics Manufacture (APCOM 2021)
- Accession number :
- edsair.doi...........942bb5f0adeb7f368f535de3e03ba2a5