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Growth of 4H-polytype silicon carbide ingots on (10 % MathType!MTEF!2!1!+- % feaagaart1ev2aaatCvAUfKttLearuqr1ngBPrgarmWu51MyVXguY9 % gCGievaerbd9wDYLwzYbWexLMBbXgBcf2CPn2qVrwzqf2zLnharyav % P1wzZbItLDhis9wBH5garqqtubsr4rNCHbGeaGqiVu0Je9sqqrpepC % 0xbbL8F4rqqrFfpeea0xe9Lq-Jc9vqaqpepm0xbba9pwe9Q8fs0-yq % aqpepae9pg0FirpepeKkFr0xfr-xfr-xb9adbaqaaeGaciGaaiaabe % qaamaaeaqbaaGcbaGafGymaeJbaebaaaa!3CDF! $$ \bar 1 $$ 0) seeds

Authors :
S. I. Dorozhkin
A. V. Bulatov
A. O. Lebedev
D. D. Avrov
Yu. M. Tairov
Source :
Semiconductors. 42:1450-1453
Publication Year :
2008
Publisher :
Pleiades Publishing Ltd, 2008.

Abstract

The growth of 4 H-polytype silicon carbide ingots by the modified Lely method on (10 $$ \bar 1 $$ 0) seeds has been investigated. It is shown that this seed plane allows intense ingot outgrowth. Single-crystal ingots up to 60 mm in diameter can be obtained at growth rates below 0.6 mm/h. Investigation of the defect structure showed that the grown ingots are practically micropipe-free but contain stacking faults and carbon inclusions.

Details

ISSN :
10906479 and 10637826
Volume :
42
Database :
OpenAIRE
Journal :
Semiconductors
Accession number :
edsair.doi...........93991a11461e25772bb789fad39b09b6
Full Text :
https://doi.org/10.1134/s1063782608120142