CMOS Device Reliability for Emerging Cryogenic Space Electronics Applications

0C (43K) in the polar shadows), makes operation of the electronics sub-systems on the surface of the Moon exceptionally difficult, but is nonetheless required for the envisioned complex suite of electronics systems used in sensing, actuation, and control of robotic systems. Such applications are typically fairly low frequency in nature (e.g., < 100 MHz), hence not requiring the most aggressively scaled CMOS technology; however, a full suite of mixed-signal circuit building blocks, and reliable operation of those circuits across extremely large variations in temperature (e.g., +120 to -230C) is needed. Adequate device reliability must clearly be achieved to accomplish this task. CMOS device degradation due to hot carriers effect (HCE) is known to be considerably worse at low temperatures [2]. Device lifetime data at cryogenic temperatures, and a solid understanding of the corresponding degradation mechanisms, are thus critical in this context of space electronics, and are addressed in this work. The Si CMOS devices investigated here are from an advanced 0.5µm SiGe BiCMOS technology, with a fixed channel width of 10.0 µm, and effective gate lengths ranging from 0.35 µm (minimum geometry), to 5.0 µm. The devices were characterized on a custom cryogenic probe system from 300K down to 43 K (-230 0 C). For brevity we will focus on the nFET data, since it represents the worst case in this technology. Fig. 1 and 2 shows typical I-V characteristics for the CMOS devices at different temperatures. The current drive capability increases significantly for the same bias conditions, as the temperature decreases. The nFET lifetime was inferred using stress-induced changes to the ID-VG characteristics. The lifetime τ is defined here as the inferred stress time for which a certain parameter of the ID-VG characteristics has shifted by a predefined amount (e.g., 10% degradation of gm). A typical lifetime assessment analysis using the ID-VG characteristics for a 1.0 µm nFET are shown in Fig. 3 and Fig. 4. The slope of 0.6 for the linear fitting in Fig. 4 suggests that interface state generation is responsible for the observed device degradation at the maximum substrate current (VG ≈ ½ VD); while that of 0.3 for the maximum gate current bias condition (VG = VD) suggests that oxide trapped charge dominates [3]. For the nFETs operating at 300K, the worst case bias condition for hot carrier degradation is known to be under maximum substrate current bias. There has been speculation that the worst case bias conditions for hot carrier degradation can, however, be a function of temperature [4]. It can be verified from Fig. 4 that for this technology, maximum substrate current is indeed the worst bias condition, at least down to 82K, and hence was the condition used here for device lifetime evaluation. The substrate current is comprised of the generated hot carriers, and is thus a good monitoring parameter for HCE in practical measurements. Fig. 5 and Fig. 6 show the effects of temperature and gate length on substrate current, respectively. It can be seen from Fig. 5 that the maximum substrate current under the same bias condition increases by 3x as temperature decreases from 300K to 43K; while Fig. 6 suggests that the maximum substrate current increases by more than 10x as L shrinks from 1.0 µm to 0.35 µm, and becomes negligible as L increases to 5.0 µm. This suggests that HCE is impacted more by device geometry than by the temperature. Fig. 7 shows the inferred lifetime at different drain bias’ at different temperatures. As seen in Fig. 7, τ decreases by ~10x as the temperature is reduced from 300K to 82K. Furthermore, τ differs by more than 100x between the 1.0 µm and 0.35/5 µm transistors, and hence the longer-channel devices are preferred for cryogenic applications of this technology Assuming fast interface trap generation dominates the HCE degradation, plotting τID versus ISUB/ID on a log-log scale should yield a straight line behavior [5]. The critical electron energy for generating an interface trap is calculated to be 3.9 eV from the slop of the line. Both the slope and the critical energy from Fig. 8 correlate well with literature data (2.9 and 3.7 eV in [5]), suggesting that interface state generation is the dominant limiting reliability factor at low temperatures.