Ion beam lithography at nanometer dimensions

Factors affecting the ultimate resolution of ion beam lithography are discussed. These factors are primary ion scattering, recoil atom scattering, range of secondary electrons, and resist properties (i.e., resist sensitivity and molecule size in the resist). From a consideration of these factors, it is estimated that minimum linewidths of ≲10 nm can be achieved in polymethyl methacrylate (PMMA) using light ions. For heavy ions such as gallium, the resolution limit is estimated to be ∼30 nm with the limitation being due to recoil atom scattering. Fabrication of high resolution silicon nitride stencil masks is described and replication of the masks with protons in PMMA is demonstrated with features as small as 20 nm.