Design and fabrication of a 94 GHz klystron

The design and fabrication issues arising from the development of a 94 GHz, 100 kW klystron are discussed. The klystron beam is focused using periodic permanent magnets that are mounted in the vacuum envelope. Several circuit fabrication processes were considered before the “LIGA” lithographic process was chosen. LIGA has the dimensional tolerances and surface finish required for klystron operation at 94 GHz.