Differential equations in miniature structures

Today, many scientists, as well as researchers, have devoted themselves to the quest of micro and nanoelectromechanical system (NEMS/MEMS) technologies because of their extraordinary potential in the field of fundamental research and application in industrial engineering. In-depth knowledge of MEMS and NEMS under various physical phenomena can significantly reduce the time and cost of designing, developing, and optimizing of the nanostructures compared with repeated fabrication and testing in the laboratory. In this section, the essential concepts for modeling ultrasmall structures are introduced, and the physical phenomena appearing on the nano- and microscale are discussed.