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TDS and RB Studies of Ar Implanted to Si

Authors :
Sadae Yamaguchi
Shohei Saito
R. Hanada
S. Nagata
Source :
Materials Science Forum. :1375-1380
Publication Year :
1995
Publisher :
Trans Tech Publications, Ltd., 1995.

Subjects

Subjects :
Materials science
Silicon
chemistry
Mechanics of Materials
Mechanical Engineering
Analytical chemistry
chemistry.chemical_element
General Materials Science
Condensed Matter Physics

Details

ISSN :
16629752
Database :
OpenAIRE
Journal :
Materials Science Forum
Accession number :
edsair.doi...........92aa95ab231190e858103594e960a70c
Full Text :
https://doi.org/10.4028/www.scientific.net/msf.196-201.1375
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