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Crystallinity Improvement of Ge Waveguides Fabricated by Epitaxial Lateral Overgrowth and Chemical Mechanical Polishing
- Source :
- Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials.
- Publication Year :
- 2015
- Publisher :
- The Japan Society of Applied Physics, 2015.
Details
- Database :
- OpenAIRE
- Journal :
- Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials
- Accession number :
- edsair.doi...........929fbd174aa95987ab94ce10e6c8e6cb
- Full Text :
- https://doi.org/10.7567/ssdm.2015.a-5-3