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Novel ionic liquid - polymer composite and an approach for its patterning by conventional photolithography
- Source :
- 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
- Publication Year :
- 2015
- Publisher :
- IEEE, 2015.
-
Abstract
- A novel crosslinkable, conductive, highly transparent composite material based on a photoresist and an ionic liquid (the names of the composites are not announced here due to the current procedure of patenting) is presented. The composite possesses a good and stable ionic conductivity (up to 10 mS cm−1 at room temperature) over a wide frequency bandwidth (1 kHz – 1 MHz) and is optically transparent (transmission value of 90 % for a 170 µm thick film). In addition, an approach for the patterning of the composite material by conventional photolithography with a good spatial resolution (line width of 20 – 30 µm) is introduced. The unique properties of the material are utilized for time- and cost-saving direct manufacturing of electrically conductive, highly transparent microcomponents.
Details
- Database :
- OpenAIRE
- Journal :
- 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
- Accession number :
- edsair.doi...........914c4983ec030eff3acf3f137c6aff57
- Full Text :
- https://doi.org/10.1109/memsys.2015.7050895