Back to Search Start Over

Novel ionic liquid - polymer composite and an approach for its patterning by conventional photolithography

Authors :
Neil MacKinnon
Anja Voigt
Natalia A. Bakhtina
Gisela Ahrens
Jan G. Korvink
Gabi Gruetzner
Source :
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
Publication Year :
2015
Publisher :
IEEE, 2015.

Abstract

A novel crosslinkable, conductive, highly transparent composite material based on a photoresist and an ionic liquid (the names of the composites are not announced here due to the current procedure of patenting) is presented. The composite possesses a good and stable ionic conductivity (up to 10 mS cm−1 at room temperature) over a wide frequency bandwidth (1 kHz – 1 MHz) and is optically transparent (transmission value of 90 % for a 170 µm thick film). In addition, an approach for the patterning of the composite material by conventional photolithography with a good spatial resolution (line width of 20 – 30 µm) is introduced. The unique properties of the material are utilized for time- and cost-saving direct manufacturing of electrically conductive, highly transparent microcomponents.

Details

Database :
OpenAIRE
Journal :
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Accession number :
edsair.doi...........914c4983ec030eff3acf3f137c6aff57
Full Text :
https://doi.org/10.1109/memsys.2015.7050895