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Simulation research of illumination system with coherent noise suppression

Authors :
Xianhao Qi
Sen Han
Linghua Zhang
Xianyu Wu
Jun Cheng
Erhui Qi
Haixiang Hu
Source :
Optical Metrology and Inspection for Industrial Applications IX.
Publication Year :
2022
Publisher :
SPIE, 2022.

Details

Database :
OpenAIRE
Journal :
Optical Metrology and Inspection for Industrial Applications IX
Accession number :
edsair.doi...........911209da74bc41210d35ae9af92aefac

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