Atom configuration study of δ-doped Er in InP by fluorescence EXAFS

We have investigated OMVPE-grown InP δ-doped with Er by EXAFS. The EXAFS measurement revealed that Er atoms which were δ-doped in InP by exposing to Er source for 15 min at 530°C (15 min Er-exposed sample) formed NaCl-structure ErP whose ErP bond length was 2.80 ± 0.03 A. The 10 min Er-exposed sample at 580°C showed a spectrum similar to cubic bixbyite structure Er 2 O 3 which was not observed in uniformly Er-doped InP samples. For the 40 min Er-exposed sample at 530°C, Er atoms formed both ErP and Er 2 O 3 .