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Surface Profile Measurement of Parallel Plates Based on Low-Coherence Light Interference
- Source :
- Laser & Optoelectronics Progress. 49:122201
- Publication Year :
- 2012
- Publisher :
- Shanghai Institute of Optics and Fine Mechanics, 2012.
Details
- ISSN :
- 10064125
- Volume :
- 49
- Database :
- OpenAIRE
- Journal :
- Laser & Optoelectronics Progress
- Accession number :
- edsair.doi...........910894301b9551559a1e5efe345f1dce