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Material Removal Mechanism in Dynamic Friction Polishing of Diamond

Authors :
Kiyoshi Suzuki
Manabu Iwai
Nobuo Yasunaga
Tetsutaro Uematsu
Source :
Key Engineering Materials. :235-240
Publication Year :
2003
Publisher :
Trans Tech Publications, Ltd., 2003.

Subjects

Subjects :
Thermochemical reaction
Materials science
Mechanical Engineering
Metallurgy
Polishing
Diamond
Material removal
engineering.material
Mechanism (engineering)
Mechanics of Materials
Chemical-mechanical planarization
engineering
General Materials Science
Dynamical friction

Details

ISSN :
16629795
Database :
OpenAIRE
Journal :
Key Engineering Materials
Accession number :
edsair.doi...........906746e41aa9789043b22f0600905d87
Full Text :
https://doi.org/10.4028/www.scientific.net/kem.238-239.235
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