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Yield Improvement Methodology with addressing Design Systematics during Production Ramp-up

Authors :
Jianhua Yin
Ian Chen
Rakesh Chokanathan
Suraj Gyawali
Yuchen Du
Yuansong Wang
Xue Mei Liu
CT Lim
Wen Zhi Gao
Source :
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Accession number :
edsair.doi...........9032a4c535004d2d4abbae6c5d38ddfa
Full Text :
https://doi.org/10.1109/asmc54647.2022.9792517