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Structural, Electrical and Optical Properties of Epitaxial ZnO Layers Grown with Various O2 Flows by Radio-Frequency Magnetron Sputtering

Authors :
J. H. Yu
T. S. Jeong
C. J. Youn
J. H. Kim
K. J. Hong
D. S. Park
Source :
Journal of the Korean Physical Society. 52:1818-1822
Publication Year :
2008
Publisher :
Korean Physical Society, 2008.

Subjects

Subjects :
Materials science
business.industry
General Physics and Astronomy
Optoelectronics
Radio frequency magnetron sputtering
High-power impulse magnetron sputtering
Epitaxy
business
Characterization (materials science)

Details

ISSN :
03744884
Volume :
52
Database :
OpenAIRE
Journal :
Journal of the Korean Physical Society
Accession number :
edsair.doi...........9020d319e3b69d6a090127f296e46ab1
Full Text :
https://doi.org/10.3938/jkps.52.1818
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