Automatic measurement of thickness and uniformity of thin films by a computer aided device

Authors :: P. Guazzoni
Ettore Gadioli
Paolo Vergani
Luisa Zetta
Pierluigi Dellera
Source :: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 334:211-216
Publication Year :: 1993
Publisher :: Elsevier BV, 1993.
Abstract: A computer aided vacuum chamber for the automatic determination of thickness and uniformity of up to 44 thin films (on a frame of 50 × 50 mm 2 ) using the energy loss method is described.

Subjects :: Physics
Nuclear and High Energy Physics
Energy loss
business.industry
Frame (networking)
Computer-aided
Optoelectronics
Vacuum chamber
Thin film
business
Instrumentation

ISSN :: 01689002
Volume :: 334
Database :: OpenAIRE
Journal :: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Accession number :: edsair.doi...........8fe306790b86c935e1d4aabf7de064ec
Full Text :: https://doi.org/10.1016/0168-9002(93)90554-u

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