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[Untitled]

Authors :
Ichiro Takano
Source :
Journal of the Surface Finishing Society of Japan. 52:80-81
Publication Year :
2001
Publisher :
The Surface Finishing Society of Japan, 2001.

Subjects

Subjects :
Materials science
Ion beam deposition
Ion beam
Ion beam mixing
business.industry
General Engineering
Analytical chemistry
Optoelectronics
Thin film
business
Ion beam-assisted deposition
Focused ion beam

Details

ISSN :
18843409 and 09151869
Volume :
52
Database :
OpenAIRE
Journal :
Journal of the Surface Finishing Society of Japan
Accession number :
edsair.doi...........8fc367dfd30102ca77d7f21ab965e439

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