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Structure and Electrochromic Properties of Wo3 Thin Films by Dc, Pulsed Dc, and Rf Magnetron Sputtering from Metallic and Ceramic Targets

Authors :
Yong Jun Park
Kwang-Mo Kang
Ji Ho Kang
Deokyeon Lee
Sung Hun Na
Seung Ho Han
Yoon-Chae Nah
Dong Hun Kim
Source :
SSRN Electronic Journal.
Publication Year :
2022
Publisher :
Elsevier BV, 2022.

Details

ISSN :
15565068
Database :
OpenAIRE
Journal :
SSRN Electronic Journal
Accession number :
edsair.doi...........8f6174c710c7cdfb3ff3f220285b44d4
Full Text :
https://doi.org/10.2139/ssrn.4075815
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