Orientation mapping of graphene in a scanning electron microscope

A scanning transmission electron diffraction method is developed for use in the scanning electron microscope to perform orientational characterization of 2D materials. The method can generate orientation maps of monolayer graphene over a field of view up to ≈ 50 μ m in just a few minutes and can distinguish twisted bilayers from aligned bilayers. This method holds promise to bring electron-diffraction-based orientation measurements of 2D materials to a broader audience.