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Cellular automata method for directed self-assembly modeling

Authors :
Oleg Gushin
Mikhail Litavrin
E. S. Gornev
Igor Matyushkin
Source :
International Conference on Micro- and Nano-Electronics 2018.
Publication Year :
2019
Publisher :
SPIE, 2019.

Subjects

Subjects :
Directed self assembly
Theoretical computer science
Materials science
Cellular automaton

Details

Database :
OpenAIRE
Journal :
International Conference on Micro- and Nano-Electronics 2018
Accession number :
edsair.doi...........8f2362d2b6f37b44c3ef9bb12492fab7

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