21.1: A 513-ppi FFS-Mode TFT-LCD using CAAC Oxide Semiconductor Fabricated by a 6-Mask Proces

A driving method which does not need planarity for high definition and enables low frequency driving was examined. Further, a 513-ppi FFS-mode liquid crystal display (LCD) panel with high aperture ratio was fabricated via a six-mask process, using a technique that combines an oxide semiconductor and an oxide conductor.