Study on Bimetal MEMS Calorimeter as Optical Power Standard with High Sensitivity and Large Sensitive Area

Authors :: Takayuki Numata
Kuniaki Amemiya
Tatsuya Zama
Minoru Tanabe
Daiji Fukuda
Source :: Netsu Bussei. 29:19-26
Publication Year :: 2015
Publisher :: The Japan Society of Thermophysical Properties, 2015.

Subjects :: Microelectromechanical systems
Materials science
Calorimeter (particle physics)
business.industry
Optoelectronics
Optical power
Sensitivity (control systems)
business
Bimetal

Full Text Access

Tools