Deposition and doping of a-Si:H from Si2H6 plasmas

MLA

D. C. Green, et al. “Deposition and Doping of A-Si:H from Si2H6 Plasmas.” AIP Conference Proceedings, Jan. 1981. EBSCOhost, https://doi.org/10.1063/1.33027.

APA

D. C. Green, B. A. Scott, E. E. Simonyi, R. M. Plecenik, M. H. Brodsky, & R. Serino. (1981). Deposition and doping of a-Si:H from Si2H6 plasmas. AIP Conference Proceedings. https://doi.org/10.1063/1.33027

Chicago

D. C. Green, B. A. Scott, E. E. Simonyi, R. M. Plecenik, M. H. Brodsky, and R. Serino. 1981. “Deposition and Doping of A-Si:H from Si2H6 Plasmas.” AIP Conference Proceedings, January. doi:10.1063/1.33027.