Direct Writing Micro-Structure on 65Mn by Femtosecond Laser

Regular line and circle arry micro-apparatus on 65Mn plate formed by femtosecond direct writting with wavelength of 800 nm, repetition rate of 1 kHz and the pulse length of 130fs in air. Investigate the effect of pulse energy and scan speed. Found, that the increased scan speed was similar to the decreased pulse energy. Due to the circle pattern was different to the line process, the contrary phenomenon appeared, which with increased ablation energy, the width of groove was less and the depth was increased.