Preparation of silicon carbide nitride thin films by sputtering of silicon nitride target

MLA

Jia Meng, et al. “Preparation of Silicon Carbide Nitride Thin Films by Sputtering of Silicon Nitride Target.” Applied Surface Science, vol. 173, Mar. 2001, pp. 313–17. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........8d0cc45fb8f0b37428feb8c76621e4cb&authtype=sso&custid=ns315887.

APA

Jia Meng, Xingfang Hu, Lixin Song, Yuzhi Zhang, & Xiao-feng Peng. (2001). Preparation of silicon carbide nitride thin films by sputtering of silicon nitride target. Applied Surface Science, 173, 313–317.

Chicago

Jia Meng, Xingfang Hu, Lixin Song, Yuzhi Zhang, and Xiao-feng Peng. 2001. “Preparation of Silicon Carbide Nitride Thin Films by Sputtering of Silicon Nitride Target.” Applied Surface Science 173 (March): 313–17. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........8d0cc45fb8f0b37428feb8c76621e4cb&authtype=sso&custid=ns315887.