Back to Search Start Over

A newly developed ECR ion source with wide dynamic range of beam current

Authors :
Suguru Itoi
Hideki Fujita
Shigeki Sakai
Source :
MRS Advances. 7:1504-1508
Publication Year :
2022
Publisher :
Springer Science and Business Media LLC, 2022.

Subjects

Subjects :
Mechanics of Materials
Mechanical Engineering
General Materials Science
Condensed Matter Physics

Details

ISSN :
20598521
Volume :
7
Database :
OpenAIRE
Journal :
MRS Advances
Accession number :
edsair.doi...........8ce616c64e24e43fe2ee47c724d0b33a
Full Text :
https://doi.org/10.1557/s43580-022-00390-4
Full Text Access
View/download PDF

Tools

Authors Abstract Subjects Details