Reduction of dislocations in GaAs and InP epitaxial layers by quasi ternary growth and its effect on device performance

It is shown that strained isoelectronically doped buffer layers grown on GaAs and InP substrates allow one to reduce the dislocation density as well as the deep level concentration. Photoluminescence measurements show an improved near gap luminescence and a reduced deep level emission. This has been also confirmed by DLTS measurements. The higher material quality is also reflected in the device performance. GaAs Schottky diodes (n ˜0.5 · 1016Cm-3) exhibit a leakage current of 100 pA up to 50 V reverse bias at room temperature even with large Schottky contact area of 125 μm × 60 μm. This technique allows the quality of electronic and optoelectronic devices to be improved.