Back to Search Start Over

Open Issues in SiC Bulk Growth

Authors :
Kanaparin Ariyawong
Jean Marc Dedulle
Yun Ji Shin
Nikolaos Tsavdaris
Didier Chaussende
Thierry Ouisse
Roland Madar
Odette Chaix-Pluchery
Martin Seiss
Eirini Sarigiannidou
Joseph La Manna
Source :
Materials Science Forum. :3-8
Publication Year :
2014
Publisher :
Trans Tech Publications, Ltd., 2014.

Abstract

In this paper, an overview of the SiC bulk growth processes is given with a special focus on the most recent results related to growth and modeling. In addition, even if SiC growth is a very old topic and that it is now considered as an « industrial development problem », we will show that there are still many open questions of both fundamental and technological importance related to its crystal growth. Process chemistry and surface mechanisms will be more specifically discussed.

Details

ISSN :
16629752
Database :
OpenAIRE
Journal :
Materials Science Forum
Accession number :
edsair.doi...........8c4cd96c58259d939dfaf63ccc2bcb01
Full Text :
https://doi.org/10.4028/www.scientific.net/msf.778-780.3