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Two-axis MEMS scanner for display and imaging applications

Authors :
Thomas W. Montague
Dean R. Brown
Ipek Basdogan
Ozan Anac
Randall B. Sprague
Caglar Ataman
Hakan Urey
Arda D. Yalcinkaya
Source :
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005..
Publication Year :
2006
Publisher :
IEEE, 2006.

Abstract

Two-axis gimbaled scanner used in an SVGA display product with 58deg optical scan angle, 1.5 mm mirror size, and 21 KHz resonant frequency is reported. Scanner is actuated electromagnetically using a single coil on the outer frame and by mechanical coupling of outer frame motion into the inner mirror frame

Details

Database :
OpenAIRE
Journal :
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005.
Accession number :
edsair.doi...........8c3e54e9dad51baa5031a4193c54d68d
Full Text :
https://doi.org/10.1109/omems.2005.1540054