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Two-axis MEMS scanner for display and imaging applications
- Source :
- IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005..
- Publication Year :
- 2006
- Publisher :
- IEEE, 2006.
-
Abstract
- Two-axis gimbaled scanner used in an SVGA display product with 58deg optical scan angle, 1.5 mm mirror size, and 21 KHz resonant frequency is reported. Scanner is actuated electromagnetically using a single coil on the outer frame and by mechanical coupling of outer frame motion into the inner mirror frame
Details
- Database :
- OpenAIRE
- Journal :
- IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005.
- Accession number :
- edsair.doi...........8c3e54e9dad51baa5031a4193c54d68d
- Full Text :
- https://doi.org/10.1109/omems.2005.1540054