Effect of Boron Ion Implantation on the Structure, Phase Composition, and Mechanical Properties of Chromium-Fullerite-Chromium Films

The structure, phase composition, and mechanical properties of three-layer chromium-fulleritechromium films subjected to implantation with B+ ions (E = 80 keV, D = 5 × 1017 ion/cm2) are studied using the methods of atomic force microscopy, X-ray diffraction phase analysis, and nanoindentation. It is established that, as a result of ion implantation, the chromium and fullerite layers are intermixed and a solid-phase interaction occurs, owing to which a heterophase structure is formed with an increased nanohardness as compared with samples not subjected to implantation.