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The structure design of piezoresistive pressure sensor based on MEMS
- Source :
- Journal of Physics: Conference Series. 1650:022082
- Publication Year :
- 2020
- Publisher :
- IOP Publishing, 2020.
-
Abstract
- This paper mainly designed the basic structure of the piezoresistive pressure sensor based on MEMS, analysed and optimized the structure size of the sensor, verified the rationality of the structure by finite element modelling. Through theoretical and optimization analysis, the main structural parameters of MEMS are determined.
Details
- ISSN :
- 17426596 and 17426588
- Volume :
- 1650
- Database :
- OpenAIRE
- Journal :
- Journal of Physics: Conference Series
- Accession number :
- edsair.doi...........8bb905955aadcb1db3a66d2951741367