Ion Implantation into GaAs for Microwave Device Applications

Authors :: Wayne M. Paulson
Source :: IEEE Transactions on Nuclear Science. 30:1713-1717
Publication Year :: 1983
Publisher :: Institute of Electrical and Electronics Engineers (IEEE), 1983.

Subjects :: Nuclear and High Energy Physics
Materials science
business.industry
Annealing (metallurgy)
Semiconductor materials
chemistry.chemical_element
Conductivity
Oxygen
Gallium arsenide
chemistry.chemical_compound
Ion implantation
Nuclear Energy and Engineering
chemistry
Impurity
Optoelectronics
Electrical and Electronic Engineering
business
Microwave

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