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Highly Damage-Resistant Reflectors for 248 nm Formed by Fluorides Multilayers
- Publication Year :
- 2009
- Publisher :
- ASTM International, 2009.
Details
- Database :
- OpenAIRE
- Accession number :
- edsair.doi...........8a87913adb76b629e3dc0044f60d3e0f
- Full Text :
- https://doi.org/10.1520/stp23641s