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Angular dependence of nanosecond laser-induced periodical surface structure periodicity on silicon

Authors :
Lei Chen
Chuan Guo
Zelin Liu
Minsun Chen
Zhongjie Xu
Hao Liu
Guomin Zhao
Kai Han
Source :
Seventh Asia Pacific Conference on Optics Manufacture (APCOM 2021).
Publication Year :
2022
Publisher :
SPIE, 2022.

Details

Database :
OpenAIRE
Journal :
Seventh Asia Pacific Conference on Optics Manufacture (APCOM 2021)
Accession number :
edsair.doi...........8a3cee829f2207ad4be08c4bfcdbc15c

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