Cross-check of ex-situ and in-situ metrology of a bendable temperature stabilized KB mirror

Authors :: Tony Warwick
Gregory Y. Morrison
Wayne R. McKinney
Iacopo Mochi
Valeriy V. Yashchuk
Sheng Sam Yuan
James Macdougall
Kenneth A. Goldberg
Richard Celestre
Source :: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 635:S58-S63
Publication Year :: 2011
Publisher :: Elsevier BV, 2011.
Abstract: At the Advanced Light Source (ALS), we are developing broadly applicable, high-accuracy, in-situ, at-wavelength wavefront slope measurement techniques for Kirkpatrick-Baez (KB) mirror nano-focusing. In this paper, we report an initial cross-check of ex-situ and in-situ metrology of a bendable temperature stabilized KB mirror. This cross-check provides a validation of the in-situ shearing interferometry currently under development at the ALS.

Subjects :: In situ
Wavefront
Physics
Shearing (physics)
Nuclear and High Energy Physics
business.industry
Free-electron laser
Synchrotron radiation
Laser
law.invention
Metrology
Interferometry
Optics
law
business
Instrumentation

ISSN :: 01689002
Volume :: 635
Database :: OpenAIRE
Journal :: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Accession number :: edsair.doi...........89c6d8f24fcf67a0bbf6691b53a87217
Full Text :: https://doi.org/10.1016/j.nima.2010.09.120

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