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Enhanced TEM Sample Preparation Using In-situ Low Energy Argon Ion Milling
- Source :
- AIP Conference Proceedings.
- Publication Year :
- 2009
- Publisher :
- AIP, 2009.
-
Abstract
- Sample preparation is a critical step in transmission electron microscopy (TEM) that significantly determines the quality of structural characterization and analysis of a specimen. In recent years, the accuracy and quality requirements for the preparation of TEM cross‐sections of nanoelectronic structures have drastically increased. Combining a focused low‐energy noble gas ion beam column with a FIB and a SEM column in a three beam system meets these requirements. It provides precise target preparation as well as minimum thickness and surface damage of the TEM sample.
Details
- Database :
- OpenAIRE
- Journal :
- AIP Conference Proceedings
- Accession number :
- edsair.doi...........89a49928450e7e6b40fcd92f6438371f