Enhanced TEM Sample Preparation Using In-situ Low Energy Argon Ion Milling

Sample preparation is a critical step in transmission electron microscopy (TEM) that significantly determines the quality of structural characterization and analysis of a specimen. In recent years, the accuracy and quality requirements for the preparation of TEM cross‐sections of nanoelectronic structures have drastically increased. Combining a focused low‐energy noble gas ion beam column with a FIB and a SEM column in a three beam system meets these requirements. It provides precise target preparation as well as minimum thickness and surface damage of the TEM sample.