Emission Trajectory Calculation of Ions from the Shave-off Cross Section for Realization of 3D Shave-off Method

Authors :: Bunbunoshin Tomiyasu
Yuto Takagi
Masanori Owari
Kohei Matsumura
So-Hee Kang
Takeki Azuma
Source :: e-Journal of Surface Science and Nanotechnology. 16:324-328
Publication Year :: 2018
Publisher :: Surface Science Society Japan, 2018.

Subjects :: 010302 applied physics
Physics
Bioengineering
02 engineering and technology
Surfaces and Interfaces
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Surfaces, Coatings and Films
Computational physics
Ion
Cross section (physics)
Mechanics of Materials
0103 physical sciences
Trajectory
0210 nano-technology
Realization (systems)
Biotechnology

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