Fabrication of SiO2 microcantilever arrays for mechanical loss measurements

Authors :: Johannes Dickmann
Gerry Hamdana
Andreas Waag
Jan Meyer
Erwin Peiner
Gianpietro Cagnoli
Nursidik Yulianto
Maik Bertke
M. Granata
Christophe Michel
Hutomo Suryo Wasisto
Shinta Mariana
Stefanie Kroker
Source :: Materials Research Express. 6:045206
Publication Year :: 2019
Publisher :: IOP Publishing, 2019.

Subjects :: Biomaterials
Surface micromachining
Oxide minerals
Fabrication
Materials science
Polymers and Plastics
business.industry
Metals and Alloys
Optoelectronics
business
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

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