Micro-contacted self-assembled tungsten oxide nanorods for hydrogen gas sensing

Electron beam lithography was used to fabricate platinum μ-contacts over tungsten oxide nanorods formed on a mica substrate. This made possible the measurement of sensorial response of these self-assembled tungsten oxide nanorods to hydrogen gas for the first time. The nanorods were prepared by thermal evaporation from an oxide source. Consequently, two types of conductometric sensors were assembled: a) percolating network of nanorods and b) set of individually contacted WO3 nanorods. The preparation procedures are described in detail and the comparison of response of both types of assemblies is given. The first sensorial measurements revealed a good response of the b) type of sensor and the minimum repeatedly detected concentration of H2 was 50 ppm.