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Sputter epitaxy of AlN and GaN on Si for device applications

Authors :
Armin Dadgar
Florian Horich
Ralf Borgmann
Christopher Luttich
Jurgen Blasing
Gordon Schmidt
Peter Veit
Jurgen Christen
Andre Strittmatter
Source :
2022 Compound Semiconductor Week (CSW).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 Compound Semiconductor Week (CSW)
Accession number :
edsair.doi...........88ed6f9b525784f1ebcf8081bb302541

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