The Dry Ashing and Etching Technology for Advanced Packaging

Subjects

Subjects :

Materials science
Ashing
Etching (microfabrication)
Metallurgy
Electrical and Electronic Engineering

Details

ISSN :

1884121X and 13439677

Volume :

24

Database :

OpenAIRE

Journal :

Journal of The Japan Institute of Electronics Packaging

Accession number :

edsair.doi...........88a1073e32e51cc5137d2266fb9ce28b