High Precision And Miniaturized Mark Position Sensing Methods For 3-D Shape Measurement

A high precision mark position sensing method for image position sensing detector (PSD) with kaleido scopic mirror tunnel (KM-PSM) is introduced. To increase the image position detecting precision of a sensor element itself, hybrid ( analogue and digital ) type position sensitive device (R-HPSD) is invented. In order to realize high precision and miniaturized 3-D position measuring system, 1-D mark direction sensing method (PM-DSM) which consist of a 1-D image position sensing element, a cylindrical lens and a parallel mirror tunnel is proposed. Furtheremore, an optical range sensing method (RORS) which is suitable to realize a miniaturized optical range sensing probe based on the triangulation, is proposed. In addition, an optical range sensing probe for advanced 3-D coordinates measuring machine is considered.