Structural origins of intrinsic stress in amorphous silicon thin films

MLA

Amir Abdallah, et al. “Structural Origins of Intrinsic Stress in Amorphous Silicon Thin Films.” Physical Review B, vol. 85, Feb. 2012. EBSCOhost, https://doi.org/10.1103/physrevb.85.075202.

APA

Amir Abdallah, Tesleem B. Asafa, Tonio Buonassisi, Sebastián Castro-Galnares, Mariana I. Bertoni, Jeffrey C. Grossman, Nouar Tabet, Eric Johlin, & Syed A.M. Said. (2012). Structural origins of intrinsic stress in amorphous silicon thin films. Physical Review B, 85. https://doi.org/10.1103/physrevb.85.075202

Chicago

Amir Abdallah, Tesleem B. Asafa, Tonio Buonassisi, Sebastián Castro-Galnares, Mariana I. Bertoni, Jeffrey C. Grossman, Nouar Tabet, Eric Johlin, and Syed A.M. Said. 2012. “Structural Origins of Intrinsic Stress in Amorphous Silicon Thin Films.” Physical Review B 85 (February). doi:10.1103/physrevb.85.075202.