Precision measurement of specular surfaces based on white light scanning interference

Based on a novel method that combining the phase deflectormetry technology and the white light scanning interferometry technology to realize precision measurement of specular surfaces, the design of the white light scanning interference measurement system is completed. On the basis of the thorough research of white light scanning interference measuring principle two mainly used white light peak detection algorithms are studied. Simulation experiment proving the validity of the algorithms is conducted and high measurement precision is reached. Influences of the system parameters (spectrum width and step interval), noise and the error of micro displacement on the measurement precision are analyzed. Reconstruction of 3D simulation steps varying from 10μm −0.05μm–40μm is completed.