Surface morphology and chemical microstructure of glow discharge polymer films prepared by plasma enhanced chemical vapor deposition at various Ar/H2 ratios

Authors :: Guo Chen
Xing Ai
Ling Zhang
Yansong Liu
Tao Wang
Jinglin Huang
Jun Li
Zhibing He
Xiaoshan He
Source :: Vacuum. 202:111142
Publication Year :: 2022
Publisher :: Elsevier BV, 2022.

Subjects :: Condensed Matter Physics
Instrumentation
Surfaces, Coatings and Films

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