Proton beam writing with scanning proton microprobe

Authors :: 余本海 Yu Benhai
李晓林 Li Xiaolin
张仲建 Zhang Zhongjian
刘江峰 Liu Jiangfeng
包良满 Bao Liangman
雷前涛 Lei Qiantao
Source :: High Power Laser and Particle Beams. 24:1603-1607
Publication Year :: 2012
Publisher :: Shanghai Institute of Optics and Fine Mechanics, 2012.

Subjects :: Microprobe
Materials science
Proton
Electrical and Electronic Engineering
Atomic physics
Atomic and Molecular Physics, and Optics
Proton beam writing

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